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Real-time Oxygen Concentration Monitoring with Smart I/O

Location / Country : Taiwan

Product Solutions:
ioLogik E2242

Smart Ethernet Remote I/O with 12 DIOs, 4 AIs

Project Introduction

Semiconductor fabrication requires precise nanometer-scale operations using dangerous chemicals and gases. An abnormally high proportion of dangerous gases to oxygen in the air may cause expensive breakdowns and even cost lives. Traditionally, semiconductor manufacturers have used programmable logic controllers (PLCs) to monitor oxygen concentration levels, control alarms, and manage ventilation systems that pump fresh oxygen into the plant to restore concentration levels. Although PLCs are well-suited for control applications, the limitations of their passive communications architecture become clear when using PLCs as an alarm solution. In particular, the central SCADA system must repeatedly poll the oxygen sensor using legacy RS-485 communications, which means real-time data about oxygen concentration levels are not readily available between polling sessions. As a result, one of the world’s largest semiconductor manufacturers needed a solution to monitor real-time oxygen concentration levels, trigger alarms, and control the ventilation system.

System Requirements

• Real-time alerts of abnormal gas levels for the supervisory control and data acquisition (SCADA) system
• Local alarms with local control logic to alert personnel of high gas levels
• Mixed analog and digital I/O solution for greater device compatibility
• High reliability
• Ethernet communication

Moxa Solution

Instead of passively waiting for the central SCADA system to poll the remote sensors, the ioLogik E2242 I/O device has local intelligence and communications capabilities to proactively update the SCADA system whenever there is a change in analog gas readings. The resulting active architecture consumes less network bandwidth than conventional polling systems while ensuring that the latest gas readings are available in the SCADA system. Moxa's exclusive auto-tag generation technology significantly simplifies the configuration of these potent features, so SCADA engineers can focus on other parts of the SCADA system instead of laboriously constructing tags one at a time on an OPC server.

More specifically, the ioLogik E2242’s menu-driven code-free Click&Go™ front-end control logic enables the smart I/O device to trigger local alarms, activate a fan to pump fresh oxygen back into the plant, and send a warning message to the Operation Control Center (OCC) via email, TCP, UDP, or SNMP trap as soon as oxygen levels become dangerously low. When the central computer at the OCC receives the warning message, it will send a remote action to the ioLogik to turn off the alarm. Finally, when the ioLogik E2242 detects that safe oxygen levels have been restored, the E2242 will deactivate the fan. In this way, the ioLogik E2242 smart Ethernet I/O was able to provide real-time oxygen concentration information, alarms, and ventilation controls to keep the semiconductor plant running smoothly.


Why Moxa

  • nstant tag updates with Active OPC Server provide real-time monitoring 
  • Daisy-chainable Ethernet solution reduces wiring costs
  • Reduce unnecessary network traffic by sending status reports only when threshold values are reached